Vol. 24 No. 4 (2014), Artículos

Vol. 24 No. 4 (2014)

Synthesis, microstructural and optical characterization of LiNbO3 thin films deposited by aerosol assisted chemical vapor deposition

Artículos

https://doi.org/10.15174/au.2014.623

Published 2014-08-21

Jose Guadalupe Murillo⁺⁻
Patricia Amézaga⁺⁻
Mario Miki⁺⁻
J. A. Ocón-Arellanes

Jose Guadalupe Murillo

Centro de Investigación en Materiales Avanzados S. C.

Patricia Amézaga

Centro de Investigación en Materiales Avanzados S. C.

Mario Miki

Centro de Investigación en Materiales Avanzados S. C.

J. A. Ocón-Arellanes

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Keywords

LiNbO3 thin films
aerosol assisted chemical vapor deposition (AACVD)
piezoelectric material.

How to Cite

Murillo, J. G., Amézaga, P., Miki, M., & Ocón-Arellanes, J. A. (2014). Synthesis, microstructural and optical characterization of LiNbO3 thin films deposited by aerosol assisted chemical vapor deposition. Acta Universitaria, 24(4), 21–26. https://doi.org/10.15174/au.2014.623

Abstract

This work reports the synthesis, micro-structural characterization and optical properties of lithium niobate (LiNbO3) thin films deposited by aerosol assisted chemical vapor deposition (AACVD) on silicon substrates. The films deposited were polycrystalline, uniform, dense, non-light scattering and firmly adhered to the substrate. This was deduced from high resolution electron microscopy studies and spectral reflectance measurements. The films were not epitaxial; however, they are considered smooth enough to be employed in optical waveguide applications, since their roughness is very low compared to the wavelength of the utilizable radiation.

https://doi.org/10.15174/au.2014.623

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